Structure and Sensor Properties of Thin Ordered Solid Films

نویسندگان
چکیده

برای دانلود رایگان متن کامل این مقاله و بیش از 32 میلیون مقاله دیگر ابتدا ثبت نام کنید

اگر عضو سایت هستید لطفا وارد حساب کاربری خود شوید

منابع مشابه

Correlation between crystal structure and optical properties of copper- doped ZnO thin films

ZnO and Cu doped[1] (CZO) thin films were prepared by radio frequency sputtering. The structural and optical properties of thin films were investigated using X-ray diffraction (XRD), atomic force microscopy (AFM), optical spectrophotometer, and photoluminescence (PL) techniques. ZnO thin films showed crystalline and micro-stress defects in the crystal lattice. Annealing of CZO thin films increa...

متن کامل

Properties and Sensor Performance of Zinc Oxide Thin Films

Reactively sputtered ZnO thin film gas sensors were fabricated onto Si wafers. The atmosphere dependent electrical response of the ZnO micro arrays was examined. The effects of processing conditions on the properties and sensor performance of ZnO films were investigated. Using AFM, SEM, XRD and WDS, the O2/Ar ratios during sputtering and Al dopant were found to control the property of ZnO films...

متن کامل

Structural, Electrical and Optical Properties of Molybdenum Oxide Thin Films Prepared by Post-annealing of Mo Thin Films

Molybdenum thin films with 50 and 150 nm thicknesses were deposited on silicon substrates, using DC magnetron sputtering system, then post-annealed at different temperatures (200, 325, 450, 575 and 700°C) with flow oxygen at 200 sccm (standard Cubic centimeter per minute). The crystallographic structure of the films was obtained by means of x-ray diffraction (XRD) analysis. An atomic force micr...

متن کامل

ذخیره در منابع من


  با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید

ژورنال

عنوان ژورنال: Sensors

سال: 2009

ISSN: 1424-8220

DOI: 10.3390/s91007733